This system has just been installed in March 2021 and has not been in operation yet. The features of this system are that the voltage of the X-ray generator can be raised up to 320kV, and the loading weight of the sample table can be up to 100kg. The spatial resolution is almost the same as that of the existing micro-CT scanner, but now that the above conditions are in place, various experiments can be performed in the micro-CT room, which has been difficult in the past.
https://www.nikonmetrology.com/en-gb/x-ray-ct/x-ray-ct-systems-225kv-and-320kv-ct-inspection-and-metrology